Residual Gas Analyzer (2024)

RGA120 Series Residual Gas Analyzers

The 120, 220 and 320 amu residual gas analyzers from SRS offer exceptional performance andvalue. TheseRGA's provide detailed gas analysis of vacuum systems at about half the price of competitivemodels. EachRGA system comes complete with a quadrupoleprobe, electronicscontrol unit(ECU), anda real-time Windows software package that is used for data acquisition andanalysis, aswell as probecontrol.

Rugged Probe Design

ContinuousDynodeElectronMultiplier X Electron Multiplier

The probe consists of anionizer, quadrupolemassfilter, anda detector. Thesimple design has a small number of parts which minimizes outgassing and reduces the chances of introducing impurities into your vacuumsystem. Theprobe assembly is rugged and mounts onto a standard 2.75"Conflatflange. Itis enclosed within a stainless steeltube, withthe exception of the ionizer which requires just 2.5" of clearance in your vacuum system—about that of a standard ion gauge. The probe is designed using self-aligning parts so it can easily be reassembled after cleaning.

Compact Electronics Control Unit

The denselypacked ECU contains all the necessary electronics for controlling the RGAhead. Itis powered by either an external +24VDC(2.5A) power supply or anoptional, built-in power module which plugs into an ACoutlet. LEDindicators provide instant feedback on the status of the electronmultiplier, filament, electronicssystem and theprobe. TheECU can easily be removed from the probe for high-temperature bakeouts.

Unique Filament Design

A long-life, dual thoriated-iridium (ThO₂/Ir)filament is used for electronemission. Dual ThO₂/Ir filaments last much longer than singlefilaments, maximizingthe time between filamentreplacement. Unlikeotherdesigns, SRSfilaments can be replaced by the user in a matter ofminutes. Improvedfilament protection checks process pressure before turning on thefilament.

Dual ThO2/Ir filament X DualThoriated-IridiumFilament

Continuous Dynode Electron Multiplier

A Faraday cup detector is standard with SRSRGAs, allowingpartial pressure measurements from 10^-5 to5×10^-11Torr. Forincreased sensitivity and faster scanrates, anoptional electron multiplier is offered that detects partial pressures down to 5×10^-14Torr. This state-of-the-art macro multi-channel, continuous-dynode electron multiplier(EM) offers increased longevity and stability, and can also be replaced by the user.

Automatic Peak Tuning

Efficient RF generation with dynamic RF resonance frequency tracking is used to provide increased massrange. Italso enables automatic peak tuning using independent RF/DC control, whileincreasing scan speeds up to 130AMU/s (260AMU/s with 10points perAMU).

New Hybrid Electrometer

A wider dynamic range hybrid electrometer works as a linear amplifier with low current (<1nA) and as a log amplifier with higher current (upto2uA). Atlow or negative current values, the linear mode leads to improved baselinesensitivity

This temperature-compensated, hybrid log electrometer detects ion current from 10^-7 to 10^-15amps in a singlescan, withbetter than 2% precision. Thishuge dynamic range means you can make measurements of small and large gas concentrationssimultaneously.

Heater Jacket X RGA Heater Jacket

Built-in I/O

A rich set of input/output connections provide monitoring and control of theRGA, and also enable external processcontrol. Anexternal scantrigger, aconfigurable event based relay, GPIO, and anRTDinput for temperature monitoring during scanning are included. Ananalog output provides a signal proportional to any scannedvariable, includingpartialpressure.

Complete Programmability

Communication with computers is made via USB, Ethernetor RS-232interfaces. Analogand histogram (bar)scans, leakdetection and probe parameters are all controlled and monitored through an extensive SCPI commandset. Thisallows easy integration into existingprograms.

RGASoft Windows Software

Pressure vs. Time Mode X RGA Software Pressure vs. Time Mode

A brand new RGASoft Windows application isincluded. Witha rich feature set and modern UI design, scan data is captured and displayed in real-time or scheduled for acquisition at a given time interval for long-term datalogging. Multiplespectral data and individual measurements can be collected together in one sequence. Versatile docking windows and widgets give the user various ways to organize thedisplay. Datacan be scaled manually orautomatically, inlinear or log format on plots. Units are selectable amongTorr, Bar, PascalandAmp. Featuresinclude common gaslabels, programmableaudio and visual alarms, expandablelibrary, compositionanalysis, andcomprehensiveon-linehelp.

The software also allows complete RGA control with easy mass scaletuning, sensitivity calibration, ionizersetup, andelectron multiplier gainadjustment. Forfurtheranalysis, datafiles can be saved in CSV text format for easy transfer intospreadsheets. Graphicimages can be saved in common formats (PNG, BMP, TIFF, JPG, SVG,PDF) or copied to the clipboard for importing directly into otherprograms.

The software supports multiple head operation when more than one RGA isneeded. MultipleRGAscan be controlled and run concurrently with multiple softwareinstances. Thenumber of RGAs is only limited by the systemresources.

Analog Mode X RGA Software Analog Mode

Performance and Value

The new RGA120 series is ideal for applications involving gasanalysis, leakdetection, and vacuumprocessing. Weoffer 120, 220 and 320amu systems with supporting Windowssoftware, andoptions that include an electron multiplier and built-inpower module for AClineoperation. TheRGAWindowssoftware is downloadable fromSRSwebsite.

RGA120DimensionalDrawing X RGA Dimensional Drawing (inches)